Product name |
Hexamethyldisilazane |
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CAS No. |
[999-97-3] |
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Structure |
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Molecular formula |
C6H19NSi2 |
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Physical and chemical properties |
Molecular Weight: 161.39 |
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Relative Density, g/cm3: 0.770-0.780 |
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Flash Point, ℃: 57.2 |
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Boiling Point, ℃: 126 |
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Refractive Index nD20: 1.4069-1.4089 |
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Specifications |
Item |
Specification |
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Appearance |
Colorless transparent liquid |
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Purity, % |
≥99.0 |
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MM, % |
≤0.5 |
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Trimethylsilanol, % |
≤0.3 |
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Features and Benefits |
• Soluble in organic solvent. |
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• Low toxicity and flammability. |
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• Stability and ease of use. |
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• HMDS can form protective coatings on various substrates. |
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Application Fields |
• Used as end capping agent. |
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• Used as a drying agent for solvents. |
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• Used as a silylation reagent. |
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• Used in the semiconductor industry for surface modification agent of silicon wafers. |
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Handling and Safety |
• Wear eye protection and protective gloves as required while handling the product. |
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• Use the product in a well ventilated area. |
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• Please consult our MSDS. |
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Usable Life and Storage |
• When stored in its original container below 40°C and unopened, the shelf life is 2 years. |
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It can still be used after re-inspection. |
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• Store in a cool and dry place out of direct sunlight. |
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• Keep out of the reach of children. |
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Packaging information |
Available in 20KGS drum or 150KGS drum. |
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